Carmelo F Aliotta

US Patent:

43351891, Jun 15, 1982

Filed:

Jul 28, 1980

Appl. No.:

6/172577

Inventors:

Carmelo F. Aliotta - Beacon NY
Morris Anschel - Carmel NY

Assignee:

International Business Machines Corp. - Armonk NY

International Classification:

H01F 100
G01N 3100

US Classification:

428611

Abstract:

A resolution standard for a scanning electron microscope has clusters of palladium in a sea urchin form. The clusters are widely scattered on a substrate so that a cluster can be acquired easily for a resolution test. The tips of the spines on the clusters are on the order of 50 Angstroms and they present a sharp clear image to an electron microscope that is operating properly. A process for forming the clusters is also disclosed.