Carl Oppenheimer - Kingston NH Mark Quaratiello - Medford MA Robert J. Bond - Newark CA
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
G01B 1100
US Classification:
356375
Abstract:
The center of a semiconductor wafer relative to a rotation axis of a spindle carrying the wafer is detected by turning the spindle while a line source of optical radiation is directed at the wafer. A CCD linear optical detector array extending along a line between the spindle axis to a point beyond the wafer periphery effectively detects the amount of optical energy intercepted by the wafer. The source is turned on for a predetermined duration and the detector is read out in response to a shaft encoder detecting that the spindle has moved to each of many predetermined angles. A microprocessor responsive to the optical detector determines the length of the line each time the detector turns on by deriving an indication of the amount of optical energy accumulated by the CCD array each time the detector turns on. The microprocessor combines the determined line length indications to detect the workpiece center relative to the spindle axis.
Apparatus And Method For Detection Of Line To Neural Back-Feed Voltage
- St. Louis MO, US Carl Oppenheimer - Kingston NH, US
International Classification:
H02J 9/06 H02J 3/00 G01R 31/08
Abstract:
An electric utility distribution system in which power is supplied by a distribution transformer through an electric utility meter including an apparatus for detecting the presence of a back-feed voltage source connected to the load. The apparatus includes a virtual neutral established in the electric utility meter at ground potential and a remote switch that is opened to interrupt electric power flow from the distribution transformer to the load. The apparatus further includes a balanced voltage divider circuit including a connection point established between a pair of series connected resistive elements. In addition, the apparatus includes a detection circuit configured to monitor a voltage signal at the connection point to detect a back-feed voltage source connected between a neutral conductor of the electric utility distribution system and one of a first or second power line at the load.