Alfred G Hopkins

US Patent:

20070052047, Mar 8, 2007

Filed:

Sep 1, 2005

Appl. No.:

11/217903

Inventors:

Costas Hadjiloucas - North Attleboro MA, US
Sean Mulligan - South Boston MA, US
David Corkum - Attleboro MA, US
Alfred Hopkins - Attleboro Falls MA, US

International Classification:

H01L 29/84

US Classification:

257417000

Abstract:

Highly corrosion resistant electrically conductive contact systems suitable for semiconductor pressure sensor devices exposed to acidic, elevated temperature environments, such as automotive exhaust gas environments, are disclosed. The preferred embodiment () comprises a platinum top layer (), and a tantalum lower layer (). Both are highly electrically conductive layers and exhibit corrosion resistance to acidic environments. The top layer of the metallization also provides a suitable material for the external connectivity (e.g., wire bonding, solder bumping, chip-chip fusion). The lower layer of the metallization also serves as an adhesion layer between the top metal and lower layers, typically silicon based glasses and in some cases serves as a diffusion barrier.